Patents
US 10886317 B2: Fabrication of optical metasurfaces
- Granted
- 2021-01-05
- Filed
- 2020-04-06 application 16841413
- Type
- Utility · 20 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
The method is provided for fabricating an optical metasurface. The method may include depositing a conductive layer over a holographic region of a wafer and depositing a dielectric layer over the conducting layer. The method may also include patterning a hard mask on the dielectric layer. The method may further include etching the dielectric layer to form a plurality of dielectric pillars with a plurality of nano-scale gaps between the pillars.
Source: PVGPATDIS, file of 2026-04-10 (ipg210105.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| Elwha LLC 1,209 patents | US company or organization | Bellevue, WA | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Gleb M. Akselrod | Durham, NC | 46 | PVGPATDIS, file of 2026-04-10 | |
| Erik Edward Josberger | Seattle, WA | 19 | PVGPATDIS, file of 2026-04-10 | |
| Mark C. Weidman | Bellevue, WA | 18 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H10F | Inorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation | H10F39/806 | PVGPATDIS, file of 2026-04-10 |
| B29D | Producing particular articles from plastics or from substances in a plastic state | B29D11/00326 | PVGPATDIS, file of 2026-04-10 |
| B82Y | Specific uses or applications of nanostructures; measurement or analysis of nanostructures; manufacture or treatment of nanostructures | B82Y20/00 | PVGPATDIS, file of 2026-04-10 |
| G01S | Radio direction-finding; radio navigation; determining distance or velocity by use of radio waves; locating or presence-detecting by use of the reflection or reradiation of radio waves; analogous arrangements using other waves | G01S7/4813 | PVGPATDIS, file of 2026-04-10 |
| G02B | Optical elements, systems or apparatus | G02B5/1809 | PVGPATDIS, file of 2026-04-10 |
| G02F | Optical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein; non-linear optics; frequency-changing of light; optical logic elements; optical analogue/digital converters | G02F1/0107 | PVGPATDIS, file of 2026-04-10 |
| G03H | Holographic processes or apparatus | G03H1/00 | PVGPATDIS, file of 2026-04-10 |
| H01J | Electric discharge tubes or discharge lamps | H01J37/3174 | PVGPATDIS, file of 2026-04-10 |
| H01L | Semiconductor devices not covered by class h10 | H01L25/0657 | PVGPATDIS, file of 2026-04-10 |
| H01Q | Antennas, i.e. radio aerials | H01Q1/38 | PVGPATDIS, file of 2026-04-10 |
| H04N | Pictorial communication, e.g. television | H04N23/54 | PVGPATDIS, file of 2026-04-10 |
| G03F | Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; materials therefor; originals therefor; apparatus specially adapted therefor; | G03F7/2041 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2024-08-20 | Assignment Assignment of assignor's interest | INVENTION SCIENCE FUND II, LLC signed 2024-06-28 | METAVC PATENT HOLDING COMPANY SISTERS, OR | 68723/735 | PASDL, file of 2026-10-15 |
| 2024-08-20 | Assignment Assignment of assignor's interest | ELWHA LLC signed 2024-06-28 | INVENTION SCIENCE FUND II, LLC BELLEVUE, WA | 68723/636 | PASDL, file of 2026-10-15 |
| 2020-04-06 | Assignment Assignment of assignor's interest | JOSBERGER, ERIK E. signed 2017-12-01 AKSELROD, GLEB M. signed 2017-12-06 WEIDMAN, MARK C. signed 2017-12-06 | ELWHA LLC BELLEVUE, WA | 52324/502 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.