Patents
US 10859439 B1: Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meets scheimpflug condition and overcomes keystone error
- Granted
- 2020-12-08
- Filed
- 2016-09-06 application 15330322
- Type
- Utility · 1 claim
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
An imaging system, and method of its use, for viewing a sample surface at an inclined angle, preferably in functional combination with a sample investigating reflectometer, spectrophotometer, ellipsometer or polarimeter system; wherein the imaging system provides that a sample surface and multi-element imaging detector surface are oriented with respect to one another to meet the Scheimpflug condition, and wherein a telecentric lens system is simultaneously positioned between the sample surface and the input surface of the multi-element imaging detector such that an image of the sample surface produced by said multi-element imaging detector is both substantially in focus over the extent thereof, and such that substantially no keystone error is demonstrated in said image.
Source: PVGPATDIS, file of 2026-04-10 (ipg201208.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| J.A. WOOLLAM CO., INC. 108 patents | US company or organization | Lincoln, NE | J.A. WOOLLAM CO., INC. State business registration EXACT high confidence: identical full name and state | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Martin M. Lihardt | Lincoln, NE | 1 | PVGPATDIS, file of 2026-04-10 | |
| Ping He | Lincoln, NE | 84 | PVGPATDIS, file of 2026-04-10 | |
| Galen L. Pfeiffer | Roca, NE | 29 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01J | Measurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light; colorimetry; radiation pyrometry | G01J3/0289 | PVGPATDIS, file of 2026-04-10 |
| G01N | Investigating or analysing materials by determining their chemical or physical properties | G01N21/211 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2016-12-06 | Assignment Assignment of assignor's interest | HE, PING signed 2016-08-22 LIPHARDT, MARTIN M. signed 2016-08-22 PFEIFFER, GALEN L. signed 2016-08-23 | J.A. WOOLLAM CO., INC. LINCOLN, NE | 40852/623 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.