Patents
US 10748788 B2: System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays
- Granted
- 2020-08-18
- Filed
- 2018-03-15 application 15922203
- Type
- Utility · 19 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A system and method for treating a substrate is described. In particular, the system and method for treating a substrate include techniques for removing particles from the surface of a microelectronic substrate. The system includes: a vacuum process chamber; a substrate stage for supporting a microelectronic substrate within the vacuum process chamber; a cryogenic fluid supply system that can provide a fluid or fluid mixture through one or more nozzles arranged within the vacuum process chamber to inject a fluid spray into the process chamber in a direction towards an upper surface of the microelectronic substrate; and a process monitoring system coupled to the vacuum process chamber, and arranged to collect fluid spray data corresponding to at least one measured attribute of the injected fluid spray downstream of an exit of the one or more nozzles.
Source: PVGPATDIS, file of 2026-04-10 (ipg200818.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| TEL FSI, INC. 34 patents | US company or organization | Chaska, MN | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Brent Schwab | Burnsville, MN | 1 | PVGPATDIS, file of 2026-04-10 | |
| Chimaobi W. Mbanaso | Chaska, MN | 8 | PVGPATDIS, file of 2026-04-10 | |
| Gregory P. Thomes | Chaska, MN | 3 | PVGPATDIS, file of 2026-04-10 | |
| Kevin Rolf | Victoria, MN | 1 | PVGPATDIS, file of 2026-04-10 | |
| Jeffrey M. Lauerhaas | Waconia, MN | 5 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H01L | Semiconductor devices not covered by class h10 | H01L21/67051 | PVGPATDIS, file of 2026-04-10 |
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P72/0414 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2020-07-30 | Correction Conversion | TEL FSI, INC. signed 2019-12-31 | TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC. CHASKA, MN | 53366/139 | PASDL, file of 2026-10-15 |
| 2018-06-21 | Assignment Assignment of assignor's interest | SCHWAB, BRENT D. signed 2018-06-12 THOMES, GREGORY P. signed 2018-06-12 ROLF, KEVIN signed 2018-06-13 LAUERHAAS, JEFFREY M. signed 2018-06-19 MBANASO, CHIMAOBI W. signed 2018-06-19 | TEL FSI, INC. CHASKA, MN | 46154/404 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.