Patents
US 10444140 B1: Theta-theta sample positioning stage with application to sample mapping using reflectometer, spectrophotometer or ellipsometer system
- Granted
- 2019-10-15
- Filed
- 2019-05-23 application 16501699
- Type
- Utility · 16 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
A sample positioning system having two rotation elements with offset therebetween, to the second of which rotation elements is affixed a sample supporting stage. The rotation axes of the two rotation element are parallel, or substantially so. The sample positioning system finds application in the mapping of samples by Metrology systems such as Reflectometer, Spectrophotometer and Ellipsometer systems.
Source: PVGPATDIS, file of 2026-04-10 (ipg191015.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| J.A. WOOLLAM CO., INC. 108 patents | US company or organization | Lincoln, NE | J.A. WOOLLAM CO., INC. State business registration EXACT high confidence: identical full name and state | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Griffin A. P. Hovorka | Lincoln, NE | 4 | PVGPATDIS, file of 2026-04-10 | |
| Martin M. Liphardt | Lincoln, NE | 78 | PVGPATDIS, file of 2026-04-10 | |
| Galen L. Pfeiffer | Roca, NE | 29 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| G01N | Investigating or analysing materials by determining their chemical or physical properties | G01N21/01 | PVGPATDIS, file of 2026-04-10 |
| G01J | Measurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light; colorimetry; radiation pyrometry | G01J3/42 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2019-07-05 | Assignment Assignment of assignor's interest | HOVORKA, GRIFFIN A. P. signed 2019-05-16 LIPHARDT, MARTIN M. signed 2019-05-16 PFEIFFER, GALEN L. signed 2019-05-16 | J. A. WOOLIAM CO., INC. LINCOLN, NE | 49687/80 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.