Patents

US 10338362 B1: Beam focusing and reflecting optics with enhanced detector system

Granted
2019-07-02
Filed
2018-07-03 application 15998118
Type
Utility · 20 claims
Elsewhere
Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗

Abstract

In ellipsometer and polarimeter systems, reflective optics including both convex and a concave mirrors that have beam reflecting surfaces, as well as aperture control of beam size to optimize operation with respect to aberration and diffraction effects while achieve the focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved, and further including detectors of electromagnetic radiation that enable optimization of the operation thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.

Source: PVGPATDIS, file of 2026-04-10 (ipg190702.xml).

Assignees

AssigneeTypePlaceAlso on furp.orgSource
J.A. WOOLLAM CO., INC. 108 patentsUS company or organizationLincoln, NEJ.A. WOOLLAM CO., INC. State business registration EXACT high confidence: identical full name and statePVGPATDIS, file of 2026-04-10

Inventors

InventorPlacePatentsPerson pageSource
Martin M. LiphardtLincoln, NE78PVGPATDIS, file of 2026-04-10
Jeffrey S. HaleLincoln, NE17PVGPATDIS, file of 2026-04-10
Ping HeLincoln, NE84PVGPATDIS, file of 2026-04-10
Galen L. PfeifferRoca, NE29PVGPATDIS, file of 2026-04-10
Duane E. MeyerLincoln, NE7PVGPATDIS, file of 2026-04-10

CPC categories

SubclassCategoryFirst groupSource
G02BOptical elements, systems or apparatusG02B17/004PVGPATDIS, file of 2026-04-10
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light; colorimetry; radiation pyrometryG01J1/0411PVGPATDIS, file of 2026-04-10
G01NInvestigating or analysing materials by determining their chemical or physical propertiesG01N21/211PVGPATDIS, file of 2026-04-10

Cooperative Patent Classification, as currently assigned (one row per subclass).

Assignments and security interests

No recorded assignments or security interests on file for this patent.

USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.