Patents
US 10020207 B2: Apparatus and method for scanning an object through a fluid stream
- Granted
- 2018-07-10
- Filed
- 2016-03-23 application 15078338
- Type
- Utility · 8 claims
- Elsewhere
- Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗
Abstract
An apparatus for treating the surface of a microelectronic workpiece via impingement of the surface with at least one fluid and a method for operating the apparatus are described. In particular, the apparatus includes a treatment chamber defining an interior space to treat the microelectronic workpiece with at least one fluid within the treatment chamber, and a movable chuck that supports the workpiece within the treatment chamber. The apparatus further includes a workpiece translational drive system configured to translate the movable chuck between a workpiece load position and at least one processing position at which the workpiece is treated with the at least one fluid using at least one nozzle connected to at least one fluid supply, and a workpiece rotational drive system configured to rotate the microelectronic workpiece.
Source: PVGPATDIS, file of 2026-04-10 (ipg180710.xml).
Assignees
| Assignee | Type | Place | Also on furp.org | Source |
|---|---|---|---|---|
| TEL FSI, INC. 34 patents | US company or organization | Chaska, MN | PVGPATDIS, file of 2026-04-10 |
Inventors
| Inventor | Place | Patents | Person page | Source |
|---|---|---|---|---|
| Mark Goluch | St. Louis Park, MN | 2 | PVGPATDIS, file of 2026-04-10 | |
| David C. Zimmerman | Prior Lake, MN | 2 | PVGPATDIS, file of 2026-04-10 | |
| Robert E. Larson | Mound, MN | 6 | PVGPATDIS, file of 2026-04-10 | |
| Edward Hanzlik | Shorewood, MN | 7 | PVGPATDIS, file of 2026-04-10 | |
| Gregory P. Thomes | Chaska, MN | 3 | PVGPATDIS, file of 2026-04-10 | |
| Christina Ann Rathman | Ellsworth, WI | 3 | PVGPATDIS, file of 2026-04-10 |
CPC categories
| Subclass | Category | First group | Source |
|---|---|---|---|
| H01L | Semiconductor devices not covered by class h10 | H01L21/67051 | PVGPATDIS, file of 2026-04-10 |
| H10P | Generic processes or apparatus for the manufacture or treatment of devices covered by class h10 | H10P72/0414 | PVGPATDIS, file of 2026-04-10 |
| B08B | Cleaning in general; prevention of fouling in general | B08B3/02 | PVGPATDIS, file of 2026-04-10 |
Cooperative Patent Classification, as currently assigned (one row per subclass).
Assignments and security interests
| Recorded | What | From | To | Reel/frame | Source |
|---|---|---|---|---|---|
| 2020-07-30 | Correction Conversion | TEL FSI, INC. signed 2019-12-31 | TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC. CHASKA, MN | 53366/139 | PASDL, file of 2026-10-15 |
| 2020-07-30 | Assignment Assignment of assignor's interest | GOLUCH, MARK signed 2013-09-04 HANZLIK, EDWARD DENEEN signed 2013-09-04 RATHMAN, CHRISTINA ANN signed 2013-09-04 LARSON, ROBERT E. signed 2013-09-10 THOMES, GREGORY PAUL signed 2013-09-10 ZIMMERMAN, DAVID C. signed 2013-09-10 | TEL FSI, INC. CHASKA, MN | 53357/628 | ECORSEXC, file of 2026-09-25 |
Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.
USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.