Patents

US 11927281 B1: Piezoelectrically-actuated microvalve device and method of fabrication

Granted
2024-03-12
Filed
2022-07-05 application 17858041
Type
Utility · 52 claims
Elsewhere
Google Patents ↗ · USPTO patent document ↗ · USPTO Patent Center record ↗

Abstract

A three-way (3-way) Micro-Electro-Mechanical Systems (MEMS)-based micro-valve device and method of fabrication for the implementation of a three-way MEMS-based micro-valve that uses a multicity of piezoelectric actuators. The 3-way has a wide range of applications including medical, industrial control, aerospace, automotive, consumer electronics and products, as well as any application(s) requiring the use of three-way micro-valves for the control of fluids. The three-way microvalve device and method of fabrication can be tailored to the requirements of a wide range of applications and fluid types. The microvalve can be used to control fluids at high pressures and provides for low flow resistances when the microvalve is open and has low leakage when closed.

Source: PVGPATDIS, file of 2026-04-10 (ipg240312.xml).

Assignees

AssigneeTypePlaceAlso on furp.orgSource
Corporation for National Research Initiatives 35 patentsUS company or organizationReston, VACORPORATION FOR NATIONAL RESEARCH INITIATIVES Nonprofit EXACT high confidence: identical full name and statePVGPATDIS, file of 2026-04-10

Inventors

InventorPlacePatentsPerson pageSource
Michael A. HuffOakton, VA38PVGPATDIS, file of 2026-04-10
Mehmet OzgurReston, VA10Person page FUZZY high confidencePVGPATDIS, file of 2026-04-10

CPC categories

SubclassCategoryFirst groupSource
F16KValves; taps; cocks; actuating-floats; devices for venting or aeratingF16K99/0048PVGPATDIS, file of 2026-04-10

Cooperative Patent Classification, as currently assigned (one row per subclass).

Assignments and security interests

RecordedWhatFromToReel/frameSource
2024-01-26Assignment
Assignment of assignor's interest
OZGUR, MEHMET signed 2023-12-06
HUFF, MICHAEL A. signed 2023-12-07
CORPORATION FOR NATIONAL RESEARCH INITIATIVES RESTON, VA66265/76ECORSEXC, file of 2026-09-25

Documents recorded with the USPTO Assignment Recordation Branch that list this patent. A security interest is a lender’s claim on the patent as collateral; a release ends it.

USPTO bulk data: PatentsView granted patents, disambiguated (PVGPATDIS) for patents, assignees, inventors, places and CPC categories; the USPTO Patent Assignment Dataset (ECORSEXC) for assignments and security interests. Patents filed in the last 20 years. No claims or full text. Links to other records are by name (and state): EXACT means the identical full name and state; FUZZY means a looser name match, with the confidence shown.